Trace Moisture Analyzer เครื่องวัดวิเคราะห์ความชื้น ความละเอียดสูง
เครื่องวัดวิเคราะห์ความชื้น ความละเอียดสูงที่มาพร้อมกับเทคโนโลยี Quartz Microbalance ใหม่ ทำงานรวดเร็ว ดูแลรักษาง่าย โดยเฉพาะ Dryer ที่ออกแบบมาใหม่ให้สามารถเปลี่ยนหน้างานได้อย่างง่ายๆ
Additional information
Application | purity gas production, Semiconductor manufacturing, separation plants |
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Description
เครื่องวัดวิเคราะห์ความชื้น ความละเอียดสูงที่มาพร้อมกับเทคโนโลยี Quartz Microbalance ใหม่ ทำงานรวดเร็ว ดูแลรักษาง่าย โดยเฉพาะ Dryer ที่ออกแบบมาใหม่ให้สามารถเปลี่ยนหน้างานได้อย่างง่ายๆ
Self-Calibrating Trace Moisture Analyzer – Low Maintenance Quartz Microbalance Technology
The next generation Advanced Quartz Crystal Microbalance analyzer from Michell Instruments is designed to provide reliable, fast and accurate measurement of trace moisture content in a variety of applications where keeping moisture to a minimum is of critical importance.
The analyzer provides consistently accurate measurements of trace moisture. This consistency is achieved using a self-calibration system, which adjusts the sensor with reference to an internal moisture generator. The moisture generator is supplied with a calibration traceable to NPL and NIST, so long term stability of its measurements is guaranteed.
Performance | |
Measuring technology | Fast Response Quartz Crystal Microbalance |
Calibrated range* | 0.1 … 700 ppmV |
Measurement range | 0.1 … 2000 ppmV |
Accuracy | ±10% of reading from 1 to 2000 ppmV 0.1 ppmV between 0.1 and 1 ppmV |
Repeatability | ±5% of reading from 1 to 2000 ppmV ±0.1 ppmV between 0.1 and 1 ppmV |
Limit of detection | 0.1 ppmV |
Available units | ppmV, ppmW, mg/Nm3, vapor pressure (Pa), dew point (°C/°F), lb/MMscf |
Response speed | T63 <2 mins to step change in either direction T95 <5 mins to step change in either direction |
Automatic calibration | Internal moisture generator source calibrated traceable to NPL and NIST |
Sensitivity | 0.01 ppmV or 1% of reading, whichever is greater |
Electrical Specifications | |
Supply voltage | 85 … 264 V AC, 47/63Hz |
Max power consumption | 150 VA |
Alarms | 1 x System alarm, volt-free change-over FORM C) 3 x process alarms, selectable for various parameters, volt free changeover (FORM C) |
Communications | Analog Outputs: 2 channels, user selectable 4 … 20 mA or 1 … 5 V Digital Communications: RS485/USB Modbus RTU, Ethernet Modbus TCP |
Data logging | Direct logging to SD card or PC via application software |
Local interface | 7” color touch screen LCD |
Operating Conditions | |
Inlet pressure | User-controlled to 1 barg With optional inlet pressure regulator: 300 barg max |
Outlet pressure | Atmospheric |
Sample flow requirement | 300ml/min total flow without bypass |
Sample gas temperature | 0 … +100 °C |
Operating environment | +5 … +45 °C up to 90 % rh |
Mechanical Specifications | |
Enclosure | 19” Rackmount, 4U x 434mm |
Gas connections | 1/4” VCR(M) |
Weight | 13.5 kg |
Suitable Applications
- High purity gas production
- Air separation plants
- Semiconductor CVD chamber cleaning
- Semiconductor etching chambers
- H2 coolant for power generator sets
Features
- Precision measurement from 0.1 to 2000ppmV
- Fast response in both dry to wet and wet to dry transitions
- Simple, low cost, on-site maintenance with long service intervals
- Dryer can be replaced by the user in 10 minutes
- Accuracy of 0.1ppmV or 10% of reading, whichever is greater
- Intuitive user interface
- Ethernet or USB digital communications
- SD card data logging
- Optional internal sample handling and bypass loop
No Accessories data.
No Media Data.
Additional information
Application | purity gas production, Semiconductor manufacturing, separation plants |
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