LD16-03 electronics – semiconductor gases measurement in ppb level

It is well known in the semiconductor industry that measuring part per billion of permanent gases in ultra high purity gases as Helium, Argon, Oxygen, Nitrogen and Hydrogen is required. Such measurement ensures quality of the product. The Application Notes 16-03 – showing the use of MicroGC MultiDetek2 in the electronic gases & semiconductor industry.

The measurement in ppb level of Hydrogen (H2),  Non-Methane Hydrocarbons (NMHC), Methane (CH4), Nitrogen (N2), Carbon Dioxide (CO2), Carbon Monoxide (CO). The specific configuration of the plasma detector that was used, allows a selective and sensitive detection of the desired impurities and blocks the undesired interference gases. Last years’ long-term work on the new patented plasma technology used for low ppb detection gives the ability to detect single-digit ppb down to 0.100ppb. It offers the possibility of measuring the complete gas matrix all in one compact industrial GC chassis without the use of any traps as commonly installed by other GC in the market.

This resulting in a detection capability of 

IMPURITIESMD2 RESULTS PPB (MINIMUM)MD2 RESULTS PPB (MAXIMUM)MD2 RESULTS PPB (AVERAGE)MD2 RESULTS PPB (DELTA MAX-MIN)ACCURACY
(%)
Hydrogen111.509112.417111.9630.908+/- 0.4
Non methane hydrocarbons129.010129.400129.2050.390+/- 0.15
Methane87.50287.76287.6320.260+/- 0.15
Nitrogen124.064124.672124.3680.608+/- 0.25
Carbon dioxide84.14084.68284.4110.542+/- 0.32
Carbon monoxide95.18296.08995.6350.907+/- 0.47

ตารางด้านล่างคือค่าต่ำสุด ละเอียดสุดที่วัดได้ และช่วงการวัดที่เครื่องสามารถวัดได้คลอบคลุม โดยยังคงความแม่นยำเดิม

CONFIGURATION NAMERANGEH2 (LDL)NMHC (LDL)CH4 (LDL)N2 (LDL)CO2 (LDL)CO (LDL)
Helium0-500ppb0.350ppb0.400ppb0.300ppb0.100ppb0.300pb0.300ppb
Argon0-500ppb0.350ppb0.400ppb0.300ppb0.100ppb0.300pb0.300ppb
Oxygen0-500ppb0.350ppb0.550ppb0.400ppb0.200ppb0.400pb0.400ppb
Hydrogen0-500ppbx0.400ppb0.400ppb0.200ppb0.400pb0.400ppb
Nitrogen0-500ppb0.350ppb0.400ppb0.400ppbx0.400pb0.400ppb

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